JPH042019U - - Google Patents
Info
- Publication number
- JPH042019U JPH042019U JP4194590U JP4194590U JPH042019U JP H042019 U JPH042019 U JP H042019U JP 4194590 U JP4194590 U JP 4194590U JP 4194590 U JP4194590 U JP 4194590U JP H042019 U JPH042019 U JP H042019U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- semiconductor wafers
- plate
- cool plate
- bake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 7
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4194590U JPH042019U (en]) | 1990-04-19 | 1990-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4194590U JPH042019U (en]) | 1990-04-19 | 1990-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042019U true JPH042019U (en]) | 1992-01-09 |
Family
ID=31553051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4194590U Pending JPH042019U (en]) | 1990-04-19 | 1990-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042019U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014067833A (ja) * | 2012-09-25 | 2014-04-17 | Tokyo Electron Ltd | 基板処理装置 |
-
1990
- 1990-04-19 JP JP4194590U patent/JPH042019U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014067833A (ja) * | 2012-09-25 | 2014-04-17 | Tokyo Electron Ltd | 基板処理装置 |
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